Controlling of material analysers of the GD-OES type with help of pump-down curves

Today, material analysis in industry and research centres is very often performed by the glow-discharge optical emission spectrometry (GD-OES), which allows an extraordinarily quick material analysis (average time of analysis: 2–5 min) and a determination mainly by the pumping time of the glow disch...

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Bibliographic Details
Published in:Vacuum 2009-09, Vol.84 (2), p.299-303
Main Authors: Klemm, Denis, Hoffmann, Volker, Edelmann, Christian
Format: Article
Language:English
Subjects:
Chambers
Desorption
Devices
Emission analysis
Evaluation
Film thickness
GD-OES
GDOS
GDS
Glow discharges
Pump curves
Pumping
Purity
Spectrometers
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Summary:Today, material analysis in industry and research centres is very often performed by the glow-discharge optical emission spectrometry (GD-OES), which allows an extraordinarily quick material analysis (average time of analysis: 2–5 min) and a determination mainly by the pumping time of the glow discharge source. The reliability of the analysis is, especially in the case of thin films (film thickness
ISSN:0042-207X
1879-2715
DOI:10.1016/j.vacuum.2009.06.058