Fe and Ti cathodes sputtering by oxygen plasma in DC glow discharges

Sputtering yields of iron and titanium cathodes have been measured over wide ranges: (0.1 

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Bibliographic Details
Published in:Vacuum 2009-05, Vol.83, p.S77-S80
Main Authors: Wroński, Z., Filiks, J.
Format: Article
Language:English
Subjects:
Cathode sputtering
Cathodes
Current density
Discharge
Glow discharge
Iron
Monte Carlo methods
Plasma spectroscopy
Plasma-solid sputtering
Sputtering
Titanium
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Description
Summary:Sputtering yields of iron and titanium cathodes have been measured over wide ranges: (0.1 
ISSN:0042-207X
1879-2715
DOI:10.1016/j.vacuum.2009.01.026