Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate

In this paper we present the design and fabrication of a fully flexible sensorial system, composed of three different sensor units implemented on an ultrathin polyimide substrate of 8 μm thick. Each unit is composed by a capacitive chemical sensor integrated with readout electronics. The sensors are...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2011-07, Vol.155 (2), p.768-774
Main Authors: Zampetti, E., Maiolo, L., Pecora, A., Maita, F., Pantalei, S., Minotti, A., Valletta, A., Cuscunà, M., Macagnano, A., Fortunato, G., Bearzotti, A.
Format: Article
Language:English
Subjects:
1-propanol
Alcohols
capacitance
Capacitive sensor
Circuits
Dielectrics
electrodes
Electronics
Ethanol
Ethyl alcohol
Flexible electronics
Flexible sensor
Frequency shift
methanol
Methyl alcohol
polymers
Sensors
Ultra thin substrate
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Summary:In this paper we present the design and fabrication of a fully flexible sensorial system, composed of three different sensor units implemented on an ultrathin polyimide substrate of 8 μm thick. Each unit is composed by a capacitive chemical sensor integrated with readout electronics. The sensors are parallel plate capacitors with the top electrode properly patterned to allow analytes diffusion into the dielectric that acts as chemical interactive material. Three different polymers, poly(tetrafluoroethene) (PTFE), poly(methyl 2-methylpropenoate) (PMMA) and benzocyclobutene (BCB), were used as dielectrics. A ring oscillator circuit, implemented with polysilicon thin film transistors (PS-nTFT), was used to convert the capacitance variations into frequency shifts. The electronic tests show oscillating frequencies of about 211 ± 2 kHz and negligible frequency shifts under different bending radius conditions. Furthermore, system response to some alcohols concentrations (Methanol, ethanol, 1-butanol, and 1-propanol) is reported and data analysis proves that the system is able to discriminate methanol from ethanol.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2011.01.045