Application of an array sensor based on plasma-deposited organic film coated quartz crystal resonators to monitoring indoor volatile compounds

The basic response ability of an array sensor based on plasma-deposited organic film-coated quartz crystal resonators (QCRs) was investigated with a view to their use for indoor air monitoring. The array of plasma-deposited organic film-coated QCRs was applied to detect and separate volatile organic...

Full description

Saved in:
Bibliographic Details
Published in:IEEE sensors journal 2002-10, Vol.2 (5), p.422-427
Main Authors: Seyama, M., Sugimoto, I., Miyagi, T.
Format: Article
Language:English
Subjects:
Arrays
Carbon compounds
Detectors
Gas detectors
Humidity
Indoor
Monitoring
Plasma
Plasma applications
Plasma temperature
Relative humidity
Resonators
Semiconductors
Sensor arrays
Sensors
Temperature sensors
Testing
VOCs
Volatile organic compounds
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The basic response ability of an array sensor based on plasma-deposited organic film-coated quartz crystal resonators (QCRs) was investigated with a view to their use for indoor air monitoring. The array of plasma-deposited organic film-coated QCRs was applied to detect and separate volatile organic compounds (VOCs) including alkanes, aromatic carbons, chlorocarbons, ketones, and alcohols. Continuous monitoring tests were tried in a real room environment (a refreshment area and a smoking area) with an array of plasma-deposited organic film-coated QCRs along with commercial sensors for indoor monitoring, a relative humidity/temperature sensor, a carbon dioxide sensor, and a three-dimensional micro-ultrasonic airflow meter. To provide a comparison commercial VOC detectors based on a photo-ionization detector and a semiconductor for indoor monitoring tests were used. The plasma-deposited organic film-coated QCRs exhibited fast pulse responses to volatile compounds in the room air along the baseline shift correlated with relative humidity changes and more sensitive responses compared with commercial organic gas detectors.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2002.804576