Integration of two degree-of-freedom magnetostrictive actuation and piezoresistive detection: application to a two-dimensional optical scanner

• Published in: Journal of microelectromechanical systems 2002-08, Vol.11 (4), p.355-361
• Main Authors: Bourouina, T., Lebrasseur, E., Reyne, G., Debray, A., Fujita, H., Ludwig, A., Quandt, E., Muro, H., Oki, T., Asaoka, A.
• Format: Article
• Language: English
• Subjects: Actuation; Anisotropy; Applied sciences; Degrees of freedom (mechanics); Detectors; Devices; Exact sciences and technology; General equipment and techniques; Geometrical optics; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Integrated circuits; Integrated optics; Magnetic anisotropy; Magnetic field effects; Magnetic properties; Magnetostriction; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Micromechanical devices and systems; Optical devices; Optical films; Optical scanners; Optical sensors; Perpendicular magnetic anisotropy; Physics; Piezoresistance; Precision engineering, watch making; Synchronism; Synchronization; Thin films; Transducers; Two dimensional
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2002.800561

A novel two-dimensional (2-D) optical-scanner device is presented. This device incorporates a highly magnetostrictive thin film with anisotropic properties, so that it can produce 2-D-actuation corresponding to bending and torsion vibrations. The magnetostrictive material is a TbFe-CoFe multilayer film, which has optimized properties for micro-actuators operating at low excitation magnetic fields. The new scanner also integrates an original 2-D piezoresistive detector realized in an easy fabrication process using integrated circuit (IC)-compatible technology. The detectors are able to selectively measure bending and torsional vibrations. This new device enables the synchronization of actuation and sensing for 2-D position control.