Three-dimensional remarkable images of low-pressure H sub(2) ICP in E-mode

Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct imag...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2005-01, Vol.33 (2)
Main Authors: Miyoshi, Y, Miyauchi, M, Oguni, A, Makabe, T
Format: Article
Language:English
Subjects:
Inductively coupled plasma
Optical emission spectroscopy
Radio frequencies
Tomography
Online Access:Get full text
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Summary:Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct image in H sub(2) ICP in the E-mode, i.e., the presence of two independent plasmas in a low-pressure region.
ISSN:0093-3813
DOI:10.1109/TPS.2005.845338