Continuous multi cycle nanoindentation studies on compositionally graded Ti1―xAlxN multilayer thin films

Two types of Compositionally Graded Multilayer (CGM) films of Ti1-xAlxN consisting of 21 layers were synthesised by reactive magnetron co-sputtering. Type 1 begins with a layer of Ti0.4Al0.6N from the substrate and ends with TiN, whereas type 2 is the opposite. The deposited CGM films are polycrysta...

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Bibliographic Details
Published in:Materials science & engineering. A, Structural materials : properties, microstructure and processing Structural materials : properties, microstructure and processing, 2011, Vol.528 (21), p.6438-6444
Main Authors: JOSE, Feby, RAMASESHAN, R, BALAMURUGAN, A. K, DASH, S, TYAGI, A. K, RAJ, Baldev
Format: Article
Language:English
Subjects:
Aluminium
Condensed matter: structure, mechanical and thermal properties
Deposition
Edge cracks
Exact sciences and technology
Indentation
Mechanical and acoustical properties
Multilayers
Nanoindentation
Physical properties of thin films, nonelectronic
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin films
Titanium nitride
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Summary:Two types of Compositionally Graded Multilayer (CGM) films of Ti1-xAlxN consisting of 21 layers were synthesised by reactive magnetron co-sputtering. Type 1 begins with a layer of Ti0.4Al0.6N from the substrate and ends with TiN, whereas type 2 is the opposite. The deposited CGM films are polycrystalline with a rocksalt structure similar to stoichiometric TiN. SIMS depth profile of the films showed the presence of 21 layers of equal thickness (50 nm) with varying aluminium content. Continuous Multi Cycle (CMC) nanoindentation was used to analyse the failure modes of the films. Topographic examination of the indented zone revealed the presence of edge cracks inside and outside the indentation area when the load exceeded 90 mN. The load-displacement profiles of CMC and single indentations showed the onset of pop-ins at a depth of about 200 nm.
ISSN:0921-5093
1873-4936
DOI:10.1016/j.msea.2011.04.068