Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules

[Display omitted] ► Sub-20nm dimensions channels are fabricated based on conventional microfabrication techniques. ► These fabricated channels with 10mm length have been successfully filled by capillary action. ► Initial experiment result and analyses of single fluorescent Alexa molecules at the sta...

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Bibliographic Details
Published in:Journal of colloid and interface science 2012-02, Vol.367 (1), p.455-459
Main Authors: Hoang, H.T., Tong, H.D., Segers-Nolten, I.M., Tas, N.R., Subramaniam, V., Elwenspoek, M.C.
Format: Article
Language:English
Subjects:
Chemistry
Confinement
Cross sections
Encapsulation
Evaporation
Exact sciences and technology
Fabrication
fluorescence
Fluorescent Dyes - analysis
General and physical chemistry
Hydrazines - analysis
Microscopy, Fluorescence
Microtechnology - methods
Nanochannels
Nanocomposites
Nanomaterials
Nanostructure
Nanostructures - chemistry
Nanostructures - ultrastructure
Single-molecule
Two dimensional
Visualization
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Summary:[Display omitted] ► Sub-20nm dimensions channels are fabricated based on conventional microfabrication techniques. ► These fabricated channels with 10mm length have been successfully filled by capillary action. ► Initial experiment result and analyses of single fluorescent Alexa molecules at the static mode are presented. We present a new and simple approach to fabricate wafer-scale, thin encapsulated, two-dimensional nanochannels by using conventional surface-micromachining technology and thin-film evaporation. The key steps to the realization of two-dimensional nanochannels are a fine etching of a sacrificial layer to create underetching spaces at the nanometer regime, and an accurate thin-film evaporation for encapsulation. Well-defined cross-sectional, encapsulated nanochannel arrays with dimensions as small as 20nm in both width and height have been realized at the wafer-scale. The fabricated nanochannels with a channel length of 10mm have been used as a suitable fluidic platform for confining a solution containing nanomolar concentrations of Alexa fluorescent molecules. Initial results toward visualization of single Alexa molecules in the confined solution are reported.
ISSN:0021-9797
1095-7103
DOI:10.1016/j.jcis.2011.10.001