Relationship Between Crystalline Structure and Hardness of Ti-Si-N-O Coatings Fabricated by dc Sputtering

Ti-Si-N-O coatings were deposited on AISI D2 tool steel and silicon substrates by dc reactive magnetron co-sputtering using a target of Ti-Si with a constant area ratio of 0.2. The substrate temperature was 400 °C and reactive atmosphere of nitrogen and argon. For all samples, argon flow was maintai...

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Bibliographic Details
Published in:Journal of materials engineering and performance 2008-08, Vol.17 (4), p.580-585
Main Authors: Garcia-Gonzalez, Leandro, Hernandez-Torres, Julian, Mendoza-Barrera, Claudia, Melendez-Lira, Miguel, Garcia-Ramirez, Pedro J, Martinez-Castillo, Jaime, Sauceda, Angel, Herrera-May, Agustin L, Munoz Saldana, Juan, Espinoza-Beltran, Francisco J
Format: Article
Language:English
Subjects:
Argon
Characterization and Evaluation of Materials
Chromium molybdenum vanadium steels
Coatings
Corrosion and Coatings
Crystal structure
Direct current
Electrical resistivity
Engineering Design
Hardness
Materials Science
Quality Control
Reliability
Safety and Risk
Titanium
Tool steels
Tribology
X-rays
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Summary:Ti-Si-N-O coatings were deposited on AISI D2 tool steel and silicon substrates by dc reactive magnetron co-sputtering using a target of Ti-Si with a constant area ratio of 0.2. The substrate temperature was 400 °C and reactive atmosphere of nitrogen and argon. For all samples, argon flow was maintained constant at 25 sccm, while the flow of the nitrogen was varied to analyze the structural changes related to chemical composition and resistivity. According to results obtained by x-ray diffraction and stoichiometry calculations by x-ray energy dispersive spectroscopy the Ti-Si-N-O coatings contain two solid solutions. The higher crystalline part corresponds to titanium oxynitrure. Hardness tests on the coatings were carried out using the indentation work model and the hardness value was determined. Finally, the values of hardness were corroborated by nanoindentation test, and values of Young’s modulus and elastic recovery were discussed. We concluded that F2TSN sample ( F Ar  = 25 sccm, F N  = 5 sccm, P  = 200 W, and P W  = 8.9 × 10 −3  mbar) presented the greatest hardness and the lowest resistivity values, due to its preferential crystalline orientation.
ISSN:1059-9495
1544-1024
DOI:10.1007/s11665-007-9141-0