Novel deposition techniques for metal oxide: Prospects for gas sensing

With the growing need for high performance gas sensors, a variety of preparation methods have been introduced and investigated. In the present contribution, the focus is on novel means for preparing metal oxide gas sensor devices. First, the key gas sensor concepts are reviewed as well as the conven...

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Bibliographic Details
Published in:Journal of electroceramics 2010-05, Vol.24 (3), p.177-199
Main Authors: Sahner, K., Tuller, H. L.
Format: Article
Language:English
Subjects:
Ceramics
Characterization and Evaluation of Materials
Chemistry and Materials Science
Composites
Crystallography and Scattering Methods
Deposition
Electrochemistry
Feature Article
Focusing
Gas sensors
Glass
Materials Science
Metal oxides
Nanocomposites
Nanomaterials
Nanostructure
Natural Materials
Optical and Electronic Materials
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Description
Summary:With the growing need for high performance gas sensors, a variety of preparation methods have been introduced and investigated. In the present contribution, the focus is on novel means for preparing metal oxide gas sensor devices. First, the key gas sensor concepts are reviewed as well as the conventional deposition techniques widely used for thick and thin film deposition of metal oxides such as screen-printing and chemical and physical vapour deposition. This is followed by a review and examination of innovative deposition techniques developed within the past several years, focusing on methods with direct-write features as well as techniques offering precise control of micro- and nano-structural features of the deposited materials.
ISSN:1385-3449
1573-8663
DOI:10.1007/s10832-008-9554-7