High resolution X-ray imaging using amorphous silicon flat-panel arrays

Two dimensional amorphous silicon arrays are the emerging technology for digital medical X-ray imaging. This paper demonstrates an improved pixel design compared with the current generation of imagers. The geometry of the pixel sensor has been extended from a mesa isolated structure into a continuou...

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Bibliographic Details
Published in:IEEE transactions on nuclear science 1999-06, Vol.46 (3), p.457-461
Main Authors: Rahn, J.T., Lemmi, F., Lu, J.P., Mei, P., Apte, R.B., Street, R.A., Lujan, R., Weisfield, R.L., Heanue, J.A.
Format: Article
Language:English
Subjects:
Amorphous silicon
Arrays
Biomedical imaging
Computer aided diagnosis
Conversion
Flat panel displays
Gates (transistor)
Geometry
Image generation
Image processing
Image resolution
Image sensors
Imaging
Isolation technology
Light emitting diodes
Mesas
Phosphors
Pixel
Pixels
Sensor arrays
Testing
Thin film transistors
X-ray imaging
X-rays
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Summary:Two dimensional amorphous silicon arrays are the emerging technology for digital medical X-ray imaging. This paper demonstrates an improved pixel design compared with the current generation of imagers. The geometry of the pixel sensor has been extended from a mesa isolated structure into a continuous layer above the readout structures of the array. This approach improves sensitivity to visible light, and to X-ray illumination when coupled with a conversion phosphor. Furthermore, this 3-dimensional geometry allows for the fabrication of the finest pitch amorphous silicon array yet manufactured, with a pixel size of 64 /spl mu/m square. A test array (512/spl times/640 pixels) has been fabricated and tested which demonstrates the success of this approach.
ISSN:0018-9499
1558-1578
DOI:10.1109/23.775562