Optimization of coupled confocal cavities for an injection-seeded, discharge-excited KrF laser system

The output energy and beam divergence of an injection-seeded KrF laser system, operating at 248 nm, were measured for twelve different coupled confocal unstable cavity arrangements, as a function of the relative timing between the slave and master oscillator lasers as well as of the cavity magnifica...

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Bibliographic Details
Published in:Applied physics. B, Lasers and optics Lasers and optics, 2007-07, Vol.88 (2), p.211-219
Main Authors: FLETCHER, J. H, WEBB, C. E
Format: Article
Language:English
Subjects:
Beam characteristics: profile, intensity, and power
spatial pattern formation
Beams (radiation)
Confocal
Divergence
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Gas lasers including excimer and metal-vapor lasers
Holes
Laser optical systems: design and operation
Lasers
Optics
Optimization
Oscillators
Physics
Resonators, cavities, amplifiers, arrays, and rings
Time delay
X- and γ-ray lasers
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Description
Summary:The output energy and beam divergence of an injection-seeded KrF laser system, operating at 248 nm, were measured for twelve different coupled confocal unstable cavity arrangements, as a function of the relative timing between the slave and master oscillator lasers as well as of the cavity magnification. The output energy was found to be strongly dependent on both the cavity magnification and the time delay, although the beam divergence shows a less sensitive dependence. An optimized output of 2.2 J in 23 ns with a divergence of 38 Delta *mrad was achieved, representing a brightness several times larger than any previously reported for a system of this type.
ISSN:0946-2171
1432-0649
DOI:10.1007/s00340-007-2679-6