Antireflective properties of AZO subwavelength gratings patterned by holographic lithography

We fabricate the aluminum-doped zinc oxide (AZO) subwavelength gratings (SWG) on Si and glass substrates by holographic lithography and sequent CH 4 /H 2 /Ar reactive ion etching process. The etch selectivity of AZO over photoresist mask as well as the nano-scale shape is optimized for better antire...

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Bibliographic Details
Published in:Applied physics. B, Lasers and optics Lasers and optics, 2010-06, Vol.99 (4), p.695-700
Main Authors: Leem, J. W., Song, Y. M., Lee, Y. T., Yu, J. S.
Format: Article
Language:English
Subjects:
Azo
Diffraction gratings
Engineering
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Gratings
Gratings (spectra)
Lasers
Lithography
Nanostructure
Optical coatings
Optical Devices
Optical elements, devices, and systems
Optics
Photonics
Physical Chemistry
Physics
Physics and Astronomy
Quantum Optics
Reflectance
Reflectivity
Silicon substrates
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Summary:We fabricate the aluminum-doped zinc oxide (AZO) subwavelength gratings (SWG) on Si and glass substrates by holographic lithography and sequent CH 4 /H 2 /Ar reactive ion etching process. The etch selectivity of AZO over photoresist mask as well as the nano-scale shape is optimized for better antireflection performance. To analyze the antireflective properties of AZO SWG surface, the optical reflectivity is measured and then calculated together with a rigorous coupled-wave analysis. The reflectance spectrum can be considerably changed by incorporating the SWG into AZO film. As the SWG height of AZO on Si substrate increases, the magnitude of interference oscillations in the reflectance spectrum tends to be reduced with the larger difference between its maxima. The use of optimized SWG can significantly reduce the surface reflection of AZO film at the desired wavelengths. The measured reflectance data of AZO SWG are reasonably consistent with the simulation results. No considerable change in transmission characteristics is observed for AZO SWG structures.
ISSN:0946-2171
1432-0649
DOI:10.1007/s00340-010-4030-x