Rapid, sensitive, and multiplexed on-chip optical sensors for micro-gas chromatography

We developed and characterized a rapid, sensitive and integrated optical vapor sensor array for micro-gas chromatography (μGC) applications. The sensor is based on the Fabry-Pérot (FP) interferometer formed by a micrometre-thin vapor-sensitive polymer layer coated on a silicon wafer. The thickness a...

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Bibliographic Details
Published in:Lab on a chip 2012-03, Vol.12 (5), p.901-905
Main Authors: Reddy, Karthik, Guo, Yunbo, Liu, Jing, Lee, Wonsuk, Oo, Maung Kyaw Khaing, Fan, Xudong
Format: Article
Language:English
Subjects:
Chromatography
Chromatography, Gas - methods
CMOS
Microarray Analysis
Monitors
Multiplexing
Polymers - chemistry
Reproducibility of Results
Sensor arrays
Sensors
Silicon
Silicon - chemistry
Time Factors
Wafers
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Summary:We developed and characterized a rapid, sensitive and integrated optical vapor sensor array for micro-gas chromatography (μGC) applications. The sensor is based on the Fabry-Pérot (FP) interferometer formed by a micrometre-thin vapor-sensitive polymer layer coated on a silicon wafer. The thickness and the refractive index of the polymer vary in response to the vapor analyte, resulting in a change in the reflected intensity of the laser impinged on the sensor. In our study, four different polymers were coated on four wells pre-etched on a silicon wafer to form a spatially separated sensor array. A CMOS imager was employed to simultaneously monitor the polymers' response, thus enabling multiplexed detection of a vapor analyte passing through the GC column. A sub-second detection time was demonstrated. In addition, a sub-picogram detection limit was achieved, representing orders of magnitude improvement over the on-chip vapor sensors previously reported.
ISSN:1473-0197
1473-0189
DOI:10.1039/c2lc20922e