Investigation into real-time pressure sensing properties of SnO2, TiO2, and TiO2/ZnO thick films with interdigitated electrodes

The pressure sensing properties of nanocomposite SnO2, TiO2, and TiO2/ZnO thick film capacitors with interdigitated electrodes are investigated. To form the dielectric layers, the metal oxides powders were respectively mixed with isopropanol, wet ball milled for 24h, then the mixtures were dried at...

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Bibliographic Details
Published in:Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 2011-09, Vol.176 (16), p.1297-1300
Main Authors: Korostynska, O, Arshak, A, Arshak, K, Morris, D
Format: Article
Language:English
Subjects:
Detection
Electrodes
Nanostructure
Sensors
Tin dioxide
Tin oxides
Titanium dioxide
Zinc oxide
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Summary:The pressure sensing properties of nanocomposite SnO2, TiO2, and TiO2/ZnO thick film capacitors with interdigitated electrodes are investigated. To form the dielectric layers, the metal oxides powders were respectively mixed with isopropanol, wet ball milled for 24h, then the mixtures were dried at 120 degree C and further the powders were placed under 2tonnes of pressure to form pellets, which were fired at 1250 degree C (rate of 5 degree C/min) in a vacuum of 610-3mbar for 5h, followed by cooling (rate of 3 degree C/min). After firing, the resultant nanopowders were mixed with 7wt.% of polyvinyl butyral (binder) and suitable amount of ethylenglycolmonobutylether (solvent) to form the pastes. These were screen-printed over the Ag electrodes on alumina substrates to form SnO2, TiO2, and TiO2/ZnO capacitor pressure sensors accordingly. The evaluation of pressure sensing properties of these sensors was performed using a HP 4192A Impedance Analyser, which recorded the changes in the values of the capacitances under different mechanical stresses. At the applied load of 5kPa, the response times of 2.5s, 5.6s and 4s were recorded for SnO2, TiO2, and TiO2/ZnO sensors, respectively. In addition to instant response times, these pressure sensors have the advantage of being reusable, as their electrical properties were restored to the original value after annealing for 2h at 80 degree C. Moreover, one year later after the initial testing, the sensors were still operational and produced similar time responses to pressure.
ISSN:0921-5107
DOI:10.1016/j.mseb.2011.07.006