Fabrication of embedded microfluidic channels in low temperature co-fired ceramic technology using laser machining and progressive lamination

This paper describes the application of laser micromachining techniques for the fabrication of microfluidic channels in low temperature co-fired ceramic, LTCC, technology. It is shown that embedded cavities can be successfully realised by employing a recently proposed progressive lamination process...

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Bibliographic Details
Published in:Journal of the European Ceramic Society 2011-11, Vol.31 (13), p.2199-2204
Main Authors: Farhan Shafique, M., Laister, Andrew, Clark, Michael, Miles, Robert E., Robertson, Ian D.
Format: Article
Language:English
Subjects:
Biomedical applications
Ceramics
Channels
Functional applications
Holes
Hot isostatic pressing
Laminates
Laser machining
Laser processing
Lasers
Microfluidics
Micromachining
Shaping
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Summary:This paper describes the application of laser micromachining techniques for the fabrication of microfluidic channels in low temperature co-fired ceramic, LTCC, technology. It is shown that embedded cavities can be successfully realised by employing a recently proposed progressive lamination process with no additional fugitive material. Various microfluidic structures have been fabricated and X-ray imaging has been used to assess the quality of the embedded channels after firing. The problem of achieving accurate alignment between LTCC layers is addressed such that deeper channels, spanning more than one layer, can be fabricated using a pre-lamination technique. A number of possible applications for the presented microfluidic structures are discussed and an H-filter particle separator in LTCC is demonstrated.
ISSN:0955-2219
1873-619X
DOI:10.1016/j.jeurceramsoc.2011.05.039