Electromagnetic-acoustic high-Q silicon resonators for liquid phase sensing

Piezoelectric and electrostatic excitation are the standard transduction methods of ultrasonic sensors. However, electromagnetic-acoustic transduction has been demonstrated as a suitable alternative with unique advantages of noncontact excitation and multi-mode vibration in inexpensive materials, su...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2010-05, Vol.57 (5), p.1000-1002
Main Authors: Lucklum, Frieder, Jakoby, Bernhard
Format: Article
Language:English
Subjects:
Acoustic measurements
Acoustics
Biomembranes
Damping
Density
Devices
Exact sciences and technology
Excitation
Frequency
Fundamental areas of phenomenology (including applications)
Impedance
Liquid phases
Physics
Q factor
Reservoirs
Resonance
Resonators
Sensors
Silicon
Transduction
acoustical devices for the generation and reproduction of sound
Vibration
Viscosity
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Summary:Piezoelectric and electrostatic excitation are the standard transduction methods of ultrasonic sensors. However, electromagnetic-acoustic transduction has been demonstrated as a suitable alternative with unique advantages of noncontact excitation and multi-mode vibration in inexpensive materials, such as thin metal plates. We have also demonstrated the use of high-Q silicon membranes as resonator elements. Here, we report on the utilization of these devices as liquid phase sensors for density and viscosity measurements.
ISSN:0885-3010
1525-8955
DOI:10.1109/TUFFC.2010.1511