Modulation of residual stress in diamond like carbon films with incorporation of nanocrystalline gold

• Published in: Applied surface science 2011-10, Vol.257 (24), p.10451-10458
• Main Authors: Paul, R., Bhattacharyya, S.R., Bhar, R., Pal, A.K.
• Format: Article
• Language: English
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition; Diamond-like carbon; Diamond-like carbon films; Exact sciences and technology; Gold; Modulation; Nanocrystalline gold; Nanocrystals; Physics; Residual stress; Silicon substrates; Stress; Stresses
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2011.06.144

► Nanocrystalline gold doped diamond like carbon films were synthesized. ► Residual stress in the films was estimated through a nondestructive way using optical absorption band tail broadening. ► Stress was found to dependent on relative amount of sp 2/sp 3 hybridized carbon atoms in the films. ► Films became stress relieved upon gold incorporation. Residual stress modulation in the diamond-like carbon coatings with incorporation of gold nanoparticles was studied critically. The films were deposited on glass and Si (1 0 0) substrates by using capacitatively coupled plasma chemical vapor deposition. Stresses in the films were determined from the broadening of the optical absorption tail and were found to decrease from 2.3 GPa to 0.48 GPa with increasing gold content (2–7 at.% Au) in the DLC matrix. Gold incorporation also made the films harder than the corresponding DLC coatings. Modulation of stress with nanocrystalline gold content in the DLC matrix was related to the relative amount of sp 2/sp 3 content in the DLC films.