Static pull-in analysis of microcantilevers based on the modified couple stress theory

► We study the size dependent behavior of electrostatically actuated microbeams. ► We used modified couple stress theory to capture the size effect. ► Results are in good agreement with experimental observations. ► According to experimental results, length scale parameter of silicon is estimated. Th...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2011-11, Vol.171 (2), p.370-374
Main Authors: Rahaeifard, M., Kahrobaiyan, M.H., Asghari, M., Ahmadian, M.T.
Format: Article
Language:English
Subjects:
1-Static pull-in
2-Modified couple stress theory
3-Size effects
Actuators
Continuums
Deflection
Electric potential
Joining
Simulation
Stresses
Voltage
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Summary:► We study the size dependent behavior of electrostatically actuated microbeams. ► We used modified couple stress theory to capture the size effect. ► Results are in good agreement with experimental observations. ► According to experimental results, length scale parameter of silicon is estimated. This paper investigates the deflection and static pull-in voltage of microcantilevers based on the modified couple stress theory, a non-classic continuum theory capable to predict the size effects for structures in micron and sub-micron scales. It is shown that the couple stress theory can remove the gap between the experimental observations and the classical theory based simulations for the static pull-in voltage.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2011.08.025