A Monolithic MEMS Accelerometer Process

A monolithic MEMS accelerometer process was established. This process successfully combines our standard BiCMOS technology and MEMS surface micromachining technique. The acceleration sensing element is a kind of comb-finger structure which is built by polysilicon surface micromachining technique. Th...

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Bibliographic Details
Published in:Key engineering materials 2011-01, Vol.483, p.70-74
Main Authors: Li, Jian Gen, Mei, Yong, Zhang, Zheng Yuan, Huang, Wen Gang, Li, Xiao Gang, Feng, Zhi Cheng
Format: Article
Language:English
Subjects:
Acceleration
Accelerometers
Capacitors
Circuits
Detection
Devices
Micromachining
Resistors
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Summary:A monolithic MEMS accelerometer process was established. This process successfully combines our standard BiCMOS technology and MEMS surface micromachining technique. The acceleration sensing element is a kind of comb-finger structure which is built by polysilicon surface micromachining technique. The polysilicon structure is designed to form two capacitors for acceleration sensing. The external acceleration will cause the value of two capacitors to vary in different direction. That means one reduces if the other increases. It was integrated with the signal conditioning circuit. In a single die, the active devices including vertical NPN, lateral PNP, PMOS and passive devices such as capacitors, resistors were fabricated which was followed by the steps to form the acceleration sensing structure. The experiment indicates that the fabricated circuit has the function of sensing capacitive variation and with a scale factor of 100mV/g.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.483.70