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Microstructure and dielectric properties of (Ba0.6Sr0.4)TiO3 thin films grown on super smooth glazed-Al2O3 ceramics substrate

. [Display omitted] ► Modified Al2O3 ceramic substrate replaces single-crystal LaAlO3 for BST films. ► The almost equivalent dielectric properties are observed on both substrates. ► Modified substrate is obtained by coating a layer of high temperature glaze. ► Glaze decreases the surface roughness t...

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Published in:Applied surface science 2011-12, Vol.258 (4), p.1510-1513
Main Authors: Chen, Hongwei, Yang, Chuanren, Zheng, Shanxue, Zhang, Jihua, Zhang, Qiaozhen, Lei, Guanhuan, Lou, Feizhi, Yang, Lijun
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cited_by cdi_FETCH-LOGICAL-c298t-445f6c8d44b6842764ffef881076d189827ff6b3f50c8d218bc2b7b52f6e3dbd3
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description . [Display omitted] ► Modified Al2O3 ceramic substrate replaces single-crystal LaAlO3 for BST films. ► The almost equivalent dielectric properties are observed on both substrates. ► Modified substrate is obtained by coating a layer of high temperature glaze. ► Glaze decreases the surface roughness to RMS
doi_str_mv 10.1016/j.apsusc.2011.09.117
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[Display omitted] ► Modified Al2O3 ceramic substrate replaces single-crystal LaAlO3 for BST films. ► The almost equivalent dielectric properties are observed on both substrates. ► Modified substrate is obtained by coating a layer of high temperature glaze. ► Glaze decreases the surface roughness to RMS &lt;0.3nm. Modified substrates with nanometer scale smooth surface were obtained via coating a layer of CaO–Al2O3–SiO2 (CaAlSi) high temperature glaze with proper additives on the rough-95% Al2O3 ceramics substrates. (Ba0.6Sr0.4)TiO3 (BST) thin films were deposited on modified Al2O3 substrates by radio-frequency magnetron sputtering. The microstructure, dielectric, and insulating properties of BST thin films grown on glazed-Al2O3 substrates were investigated by X-ray diffraction (XRD), atomic force microscope (AFM), and dielectric properties measurement. These results showed that microstructure and dielectric properties of BST thin films grown on glazed-Al2O3 substrates were almost consistent with that of BST thin films grown on LaAlO3 (100) single-crystal substrates. Thus, the expensive single-crystal substrates may be substituted by extremely cheap glazed-Al2O3 substrates.</description><identifier>ISSN: 0169-4332</identifier><identifier>EISSN: 1873-5584</identifier><identifier>DOI: 10.1016/j.apsusc.2011.09.117</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Aluminum oxide ; Barium strontium titanate ; Barium strontium titanates ; Ceramics ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Deposition ; Dielectric properties ; Electrical property ; Exact sciences and technology ; Ferroelectric thin film ; Glazed-Al2O3 substrate ; Microstructure ; Physics ; Single crystals ; Thin films</subject><ispartof>Applied surface science, 2011-12, Vol.258 (4), p.1510-1513</ispartof><rights>2011 Elsevier B.V.</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c298t-445f6c8d44b6842764ffef881076d189827ff6b3f50c8d218bc2b7b52f6e3dbd3</citedby><cites>FETCH-LOGICAL-c298t-445f6c8d44b6842764ffef881076d189827ff6b3f50c8d218bc2b7b52f6e3dbd3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=25643151$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Chen, Hongwei</creatorcontrib><creatorcontrib>Yang, Chuanren</creatorcontrib><creatorcontrib>Zheng, Shanxue</creatorcontrib><creatorcontrib>Zhang, Jihua</creatorcontrib><creatorcontrib>Zhang, Qiaozhen</creatorcontrib><creatorcontrib>Lei, Guanhuan</creatorcontrib><creatorcontrib>Lou, Feizhi</creatorcontrib><creatorcontrib>Yang, Lijun</creatorcontrib><title>Microstructure and dielectric properties of (Ba0.6Sr0.4)TiO3 thin films grown on super smooth glazed-Al2O3 ceramics substrate</title><title>Applied surface science</title><description>. [Display omitted] ► Modified Al2O3 ceramic substrate replaces single-crystal LaAlO3 for BST films. ► The almost equivalent dielectric properties are observed on both substrates. ► Modified substrate is obtained by coating a layer of high temperature glaze. ► Glaze decreases the surface roughness to RMS &lt;0.3nm. Modified substrates with nanometer scale smooth surface were obtained via coating a layer of CaO–Al2O3–SiO2 (CaAlSi) high temperature glaze with proper additives on the rough-95% Al2O3 ceramics substrates. (Ba0.6Sr0.4)TiO3 (BST) thin films were deposited on modified Al2O3 substrates by radio-frequency magnetron sputtering. The microstructure, dielectric, and insulating properties of BST thin films grown on glazed-Al2O3 substrates were investigated by X-ray diffraction (XRD), atomic force microscope (AFM), and dielectric properties measurement. These results showed that microstructure and dielectric properties of BST thin films grown on glazed-Al2O3 substrates were almost consistent with that of BST thin films grown on LaAlO3 (100) single-crystal substrates. Thus, the expensive single-crystal substrates may be substituted by extremely cheap glazed-Al2O3 substrates.</description><subject>Aluminum oxide</subject><subject>Barium strontium titanate</subject><subject>Barium strontium titanates</subject><subject>Ceramics</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Deposition</subject><subject>Dielectric properties</subject><subject>Electrical property</subject><subject>Exact sciences and technology</subject><subject>Ferroelectric thin film</subject><subject>Glazed-Al2O3 substrate</subject><subject>Microstructure</subject><subject>Physics</subject><subject>Single crystals</subject><subject>Thin films</subject><issn>0169-4332</issn><issn>1873-5584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNp9kE1v1DAQhi0EEkvhH3DwBQGHBH_FcS5IpaIFqagHytlynHHrVRIvHgcEEv8dr7biyGkO87zzah5CXnLWcsb1u33rDrihbwXjvGVDy3n_iOy46WXTdUY9JruKDY2SUjwlzxD3jHFRtzvy50v0OWHJmy9bBurWiU4RZvAlR08POR0glwhIU6BvPjjW6q-ZtertbbyRtNzHlYY4L0jvcvq50rRS3GqC4pJSuad3s_sNU3M-i0p7yG6JHisy1kZX4Dl5EtyM8OJhnpFvlx9vLz411zdXny_OrxsvBlMapbqgvZmUGrVRotcqBAjGcNbriZvBiD4EPcrQsUoJbkYvxn7sRNAgp3GSZ-T16W795_sGWOwS0cM8uxXShnbQ0nQDH0Ql1Yk8WsEMwR5yXFz-ZTmzR9l2b0-y7VG2ZYOtsmvs1UOBQ-_mkN3qI_7Lik4ryTteufcnDuq3PyJkiz7C6mGKuSq3U4r_L_oL7SuX0g</recordid><startdate>20111201</startdate><enddate>20111201</enddate><creator>Chen, Hongwei</creator><creator>Yang, Chuanren</creator><creator>Zheng, Shanxue</creator><creator>Zhang, Jihua</creator><creator>Zhang, Qiaozhen</creator><creator>Lei, Guanhuan</creator><creator>Lou, Feizhi</creator><creator>Yang, Lijun</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QF</scope><scope>7QQ</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20111201</creationdate><title>Microstructure and dielectric properties of (Ba0.6Sr0.4)TiO3 thin films grown on super smooth glazed-Al2O3 ceramics substrate</title><author>Chen, Hongwei ; 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[Display omitted] ► Modified Al2O3 ceramic substrate replaces single-crystal LaAlO3 for BST films. ► The almost equivalent dielectric properties are observed on both substrates. ► Modified substrate is obtained by coating a layer of high temperature glaze. ► Glaze decreases the surface roughness to RMS &lt;0.3nm. Modified substrates with nanometer scale smooth surface were obtained via coating a layer of CaO–Al2O3–SiO2 (CaAlSi) high temperature glaze with proper additives on the rough-95% Al2O3 ceramics substrates. (Ba0.6Sr0.4)TiO3 (BST) thin films were deposited on modified Al2O3 substrates by radio-frequency magnetron sputtering. The microstructure, dielectric, and insulating properties of BST thin films grown on glazed-Al2O3 substrates were investigated by X-ray diffraction (XRD), atomic force microscope (AFM), and dielectric properties measurement. These results showed that microstructure and dielectric properties of BST thin films grown on glazed-Al2O3 substrates were almost consistent with that of BST thin films grown on LaAlO3 (100) single-crystal substrates. Thus, the expensive single-crystal substrates may be substituted by extremely cheap glazed-Al2O3 substrates.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.apsusc.2011.09.117</doi><tpages>4</tpages></addata></record>
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subjects Aluminum oxide
Barium strontium titanate
Barium strontium titanates
Ceramics
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Deposition
Dielectric properties
Electrical property
Exact sciences and technology
Ferroelectric thin film
Glazed-Al2O3 substrate
Microstructure
Physics
Single crystals
Thin films
title Microstructure and dielectric properties of (Ba0.6Sr0.4)TiO3 thin films grown on super smooth glazed-Al2O3 ceramics substrate
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