On an indium–tin-oxide thin film based ammonia gas sensor

An ammonia sensor basing on the indium tin oxide (ITO) thin film on a quartz substrate which was fabricated by RF sputtering with substrate thermal treatment, is studied and demonstrated. From the experimental results, the good NH 3 sensing performances including high response of 2312%, fast respons...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2011-12, Vol.160 (1), p.1481-1484
Main Authors: Lin, Cheng-Wei, Chen, Huey-Ing, Chen, Tai-You, Huang, Chien-Chang, Hsu, Chi-Shiang, Liu, Rong-Chau, Liu, Wen-Chau
Format: Article
Language:English
Subjects:
Actuators
Ammonia
Ammonia sensor
Devices
Gas sensors
Grain size
Indium tin oxide
ITO
Oxygen deficiency
Quartz
RF sputtering
Sensors
Thin films
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Summary:An ammonia sensor basing on the indium tin oxide (ITO) thin film on a quartz substrate which was fabricated by RF sputtering with substrate thermal treatment, is studied and demonstrated. From the experimental results, the good NH 3 sensing performances including high response of 2312%, fast response and recovery times of 73 and 104 s upon the introduction of a 1000 ppm NH 3/air gas at 150 °C are observed. In comparison, the proposed sensor is superior to other previously reported ITO thin film based ammonia sensors. Due to the advantages of simple structure, easy operation, low cost, and excellent performances, the studied device gives a promising use in high-performance ammonia sensor applications.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2011.07.041