Chemical management in the fab of the future

The semiconductor manufacturing industry is ripe for adoption of automation and control technology commonly available outside the industry. Previous efforts have been characterized by large expenditures with individual equipment and facility providers each supplying a local and independent solution...

Full description

Saved in:
Bibliographic Details
Published in:Semiconductor International 2000-08, Vol.23 (9), p.95
Main Authors: van den Berg, Marc, Jung, Jay, Curcio, Joe
Format: Magazinearticle
Language:English
Subjects:
Automation
Control systems
Decision making
Manufacturing
Middleware
Process controls
Semiconductors
Software
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The semiconductor manufacturing industry is ripe for adoption of automation and control technology commonly available outside the industry. Previous efforts have been characterized by large expenditures with individual equipment and facility providers each supplying a local and independent solution associated with their product area, with little focus on the overall integration of the data, analysis, monitoring and control. The integration of process, facility, life safety, administration, materials management, engineering and sales by a middle-ware provider can lower costs, improve productivity and increase value.
ISSN:0163-3767