The cylinder's impact on metal impurities in CO

A new cylinder package has been developed for carbon monoxide that reduces iron contamination by 3 orders of magnitude from 870 ppb to sub-ppb levels (0.6 ppb). This significant reduction in iron contamination has been achieved in exchange for a sub-ppb increase in aluminum, zinc, and copper contami...

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Bibliographic Details
Published in:Semiconductor international 1998-04, Vol.21 (4), p.127
Main Authors: Andersen, Peter C, Cooper, Gerald, Houlding, Virginia H
Format: Magazinearticle
Language:English
Subjects:
Aluminum
Carbon monoxide
Carbon steel
Contamination
Copper
Gases
Iron
Metals
Nickel
Physical chemistry
R&D
Research & development
Semiconductors
Stainless steel
Valves
Zinc
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Summary:A new cylinder package has been developed for carbon monoxide that reduces iron contamination by 3 orders of magnitude from 870 ppb to sub-ppb levels (0.6 ppb). This significant reduction in iron contamination has been achieved in exchange for a sub-ppb increase in aluminum, zinc, and copper contamination from the package. A brass valve was found to be superior to a stainless steel DISS valve in carbon monoxide service. This is because significant levels of iron (50 ppb) and nickel (1 ppb) were found to be extracted from the DISS valve.
ISSN:0163-3767