Optimizing the Interface Between Design and Manufacturing

The resolution enhancement technique (RET) design flow has become a conglomeration of various point tools and methodologies. Deep sub-wavelength design for manufacturing (DFM) requirements have forced the design and manufacturing communities into very tight collaboration. The EDA industry is also dr...

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Bibliographic Details
Published in:Semiconductor International 2006-07, Vol.29 (8), p.53
Main Authors: Sweis, Jason, Huckaby, Judy, Naber, Bob, Laidig, Tom
Format: Magazinearticle
Language:English
Subjects:
Design
Design optimization
Designers
Electronic design automation
Feasibility studies
Infrastructure
Interfaces
Manufacturing
Recipes
Scanners
Semiconductors
Simulation
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Summary:The resolution enhancement technique (RET) design flow has become a conglomeration of various point tools and methodologies. Deep sub-wavelength design for manufacturing (DFM) requirements have forced the design and manufacturing communities into very tight collaboration. The EDA industry is also driven to provide an infrastructure to facilitate communication for these communities. A key part of this infrastructure for communication is a modeling file called the Process Model File (PMF). With the help of new EDA tools and flows, designers are starting to embed design information in manufacturing data, permitting downstream tools to optimize analysis on structures that are critical to the design. The PMF should be regarded as an enabling technology. It is an infrastructure by which critical modeling and recipe information can be passed both upstream and downstream. This channel of communication will allow faster ramp of new technology nodes, as well as doing designs right the first time.
ISSN:0163-3767