VOLATILE ORGANIC ACHIEVEMENTS

The regenerative thermal oxidizer (RTO) is one of the standard pieces of equipment used to control the emission of volatile organic compounds (VOCs) in the semiconductor industry. An RTO uses a regenerative heat exchange in two or more packed beds operated with periodic flow reversals. The beds, fil...

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Bibliographic Details
Published in:Pollution Engineering 2009-11, Vol.41 (11), p.30-33
Main Authors: Miller, John D, Gilliland, Tina, Bunimovich, Grigori A, Matros, Yurii Sh
Format: Magazinearticle
Language:English
Subjects:
Copper
Cost control
Energy consumption
Energy efficiency
Gases
Heat
Oxidation
Semiconductors
Silicon
Temperature
VOCs
Volatile organic compounds
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Summary:The regenerative thermal oxidizer (RTO) is one of the standard pieces of equipment used to control the emission of volatile organic compounds (VOCs) in the semiconductor industry. An RTO uses a regenerative heat exchange in two or more packed beds operated with periodic flow reversals. The beds, filled with an inert ceramic media, are connected by a combustion chamber where one or more fuel burners are installed for system startup, and to maintain necessary temperature at low concentrations of VOCs. Despite the high degree of energy regeneration, RTOs can still require high fuel consumption -- especially at high airflow rates. The actual fuel consumption in the original and retrofitted units was estimated based on the measured temperatures, VOC loadings and flow rates. The method of estimations was based on a heat balance accounting for energy spent for heating the process gas and combustion air, and useful heat from VOC oxidation.
ISSN:0032-3640