Indirect broadband optical monitoring with multiple witness substrates

We present an indirect broadband optical monitoring approach based on using several witness substrates that are brought to a measurement position in a special sequence. Different witness substrates are used to monitor not groups of successive design layers but specially chosen design layers. An attr...

Full description

Saved in:
Bibliographic Details
Published in:Applied optics. Optical technology and biomedical optics 2009-04, Vol.48 (12), p.2315
Main Authors: Zhupanov, Valery G, Klyuev, Evgeny V, Alekseev, Sergey V, Kozlov, Ivan V, Trubetskov, Michael K, Kokarev, Michael A, Tikhonravov, Alexander V
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We present an indirect broadband optical monitoring approach based on using several witness substrates that are brought to a measurement position in a special sequence. Different witness substrates are used to monitor not groups of successive design layers but specially chosen design layers. An attractive feature of the presented monitoring approach is the ability to reliably control thin dielectric and metal layers. Considered examples demonstrate a good accuracy of the proposed approach.
ISSN:2155-3165
DOI:10.1364/AO.48.002315