Ta2O5- and TiO2-based nanostructures made by atomic layer deposition

Nanotubular Ta(2)O(5)- and TiO(2)-based structures were prepared by atomic layer deposition of Ta(2)O(5) and TiO(2) thin films, conformally on pore walls of porous alumina membranes. Both self-supporting alumina membranes and Si-supported thin-film membranes were studied as templates. Long Ta(2)O(5)...

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Bibliographic Details
Published in:Nanotechnology 2010-01, Vol.21 (3), p.035301-035301
Main Authors: Kemell, Marianna, Härkönen, Emma, Pore, Viljami, Ritala, Mikko, Leskelä, Markku
Format: Article
Language:English
Subjects:
Deposition
Membranes
Nanocomposites
Nanomaterials
Nanostructure
Nanotubes
Photocatalysis
Tantalum oxides
Titanium dioxide
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Summary:Nanotubular Ta(2)O(5)- and TiO(2)-based structures were prepared by atomic layer deposition of Ta(2)O(5) and TiO(2) thin films, conformally on pore walls of porous alumina membranes. Both self-supporting alumina membranes and Si-supported thin-film membranes were studied as templates. Long Ta(2)O(5) and TiO(2) nanotubes were prepared successfully with the self-supporting membranes. The TiO(2) nanotubes showed photocatalytic activity in methylene blue degradation under UV illumination. The Ta(2)O(5) and TiO(2) nanotubes were further modified by depositing Pt nanoparticles inside them. The Si-supported thin-film membranes were used as templates for the preparation of robust Ta(2)O(5)-coated Ni nanorod arrays on a Si substrate using electrodeposition, chemical etching and atomic layer deposition. In addition to photocatalysis, the nanostructures prepared in this work may find applications as other catalysts and as solid-state or electrochemical capacitors.
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/21/3/035301