A Parylene MEMS Electrothermal Valve

The first microelectromechanical-system normally closed electrothermal valve constructed using Parylene C is described, which enables both low power (in milliwatts) and rapid operation (in milliseconds). This low-power valve is well suited for applications in wirelessly controlled implantable drug-d...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2009-12, Vol.18 (6), p.1184-1197
Main Authors: Po-Ying Li, Givrad, T.K., Holschneider, D.P., Maarek, J.-M.I., Meng, E.
Format: Article
Language:English
Subjects:
Biological materials
Biomedical materials
Biomembranes
Catheters
Drug delivery
Electrothermal effects
electrothermal valve
Energy consumption
In vivo tests
Mathematical models
Microelectromechanical systems
Micromechanical devices
Microorganisms
Parylene C
Polymers
Pumps
Silicon
Surgical implants
Valves
wireless operation
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Description
Summary:The first microelectromechanical-system normally closed electrothermal valve constructed using Parylene C is described, which enables both low power (in milliwatts) and rapid operation (in milliseconds). This low-power valve is well suited for applications in wirelessly controlled implantable drug-delivery systems. The simple design was analyzed using both theory and modeling and then characterized in benchtop experiments. Operation in air (constant current) and water (current ramping) was demonstrated. Valve-opening powers of 22 mW in air and 33 mW in water were obtained. Following integration of the valve with catheters, our valve was applied in a wirelessly operated microbolus infusion pump, and the in vivo functionality for the appropriateness of use of this pump for future brain mapping applications in small animals was demonstrated.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2009.2031689