Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.

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Bibliographic Details
Published in:Applied optics. Optical technology and biomedical optics 2011-03, Vol.50 (9), p.C19
Main Authors: Oliver, James B, Kupinski, Pete, Rigatti, Amy L, Schmid, Ansgar W, Lambropoulos, John C, Papernov, Semyon, Kozlov, Alexei, Spaulding, John, Sadowski, Daniel, Chrzan, Z Roman, Hand, Robert D, Gibson, Desmond R, Brinkley, Ian, Placido, Frank
Format: Article
Language:English
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Description
Summary:Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.
ISSN:2155-3165
DOI:10.1364/AO.50.000C19