A dual lateral-field-excited bulk acoustic wave sensor array

Recently, there has been interest in the fabrication of multiple quartz crystal microbalances (QCMs) on a single substrate to create a sensor array. However, such devices are ultimately subject to the limitations of the QCM configuration, requiring electrodes and wires on the sensing surface of the...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2013-03, Vol.60 (3), p.573-578
Main Authors: Winters, S., Bernhardt, G., Vetelino, J. F.
Format: Article
Language:English
Subjects:
Admittance
Arrays
Crystals
Electrodes
Finite element methods
Sensors
Substrates
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Summary:Recently, there has been interest in the fabrication of multiple quartz crystal microbalances (QCMs) on a single substrate to create a sensor array. However, such devices are ultimately subject to the limitations of the QCM configuration, requiring electrodes and wires on the sensing surface of the crystal substrate, resulting in a cumbersome arrangement that is unable to detect electrical property changes. The lateral-field-excited (LFE) sensor is a novel sensing device that only requires electrodes on the back side of the substrate. With a bare sensing surface, the LFE sensor is a better choice for implementing a sensor array. The purpose of this paper is to report on the fabrication and testing of two independent LFE devices on a single substrate. The individual LFE elements are shown to respond to both electrical and mechanical property changes, with minimal crosstalk between the LFE elements.
ISSN:0885-3010
1525-8955
DOI:10.1109/TUFFC.2013.2598