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Quadrature phase interferometer for high resolution force spectroscopy

In this article, we present a deflection measurement setup for Atomic Force Microscopy (AFM). It is based on a quadrature phase differential interferometer: we measure the optical path difference between a laser beam reflecting above the cantilever tip and a reference beam reflecting on the static b...

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Bibliographic Details
Published in:Review of scientific instruments 2013-09, Vol.84 (9), p.095001-095001
Main Authors: Paolino, Pierdomenico, Aguilar Sandoval, Felipe A., Bellon, Ludovic
Format: Article
Language:English
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Summary:In this article, we present a deflection measurement setup for Atomic Force Microscopy (AFM). It is based on a quadrature phase differential interferometer: we measure the optical path difference between a laser beam reflecting above the cantilever tip and a reference beam reflecting on the static base of the sensor. A design with very low environmental susceptibility and another allowing calibrated measurements on a wide spectral range are described. Both enable a very high resolution (down to \documentclass[12pt]{minimal}\begin{document}$2.5 \times 10^{-15}\,{\rm m}/\sqrt{\rm Hz}$\end{document} 2.5 × 10 − 15 m / Hz ), illustrated by thermal noise measurements on AFM cantilevers. They present an excellent long-term stability and a constant sensitivity independent of the optical phase of the interferometer. A quick review shows that our precision is equaling or out-performing the best results reported in the literature, but for a much larger deflection range, up to a few μm.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4819743