A Liquid Optical Phase Shifter With an Embedded Electrowetting Actuator

We demonstrate an electrowetting-based liquid optical phase shifter. The phase shifter consists of two immiscible liquid layers with different refractive indices. Sandwiched between the two liquids is a rigid membrane that moves freely along the optical axis and is supported by a compliant surround....

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2017-04, Vol.26 (2), p.305-307
Main Authors: Ousati Ashtiani, Alireza, Jiang, Hongrui
Format: Article
Language:English
Subjects:
Biomedical optical imaging
electrooptic modulators
electrowetting
Liquids
Optical device fabrication
Optical imaging
Optical interferometry
Optical modulation
Optical refraction
phase shifter
Phase shifters
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Summary:We demonstrate an electrowetting-based liquid optical phase shifter. The phase shifter consists of two immiscible liquid layers with different refractive indices. Sandwiched between the two liquids is a rigid membrane that moves freely along the optical axis and is supported by a compliant surround. When applied with a pressure, the thicknesses of both liquid layers change, which induces a difference in optical path, resulting in a phase shift. A miniaturized electrowetting-based actuator is used to produce hydraulic pressure. A multi-layered SU8 bonded structure was fabricated. A phase shift of 171° was observed when the device was incorporated in the Mach-Zehnder interferometer and driven with 100 V. [2016-0201].
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2017.2650406