Preparation of MoS2 Nanospheres using a Hydrothermal Method and Their Application as Ammonia Gas Sensors Based on Delay Line Surface Acoustic Wave Devices

An ammonia sensor based on a delay-line surface acoustic wave (SAW) device is developed in this study by coating the delay line area of the device with a nano-structured molybdenum disulfide (MoS2) sensitive material. A SAW device of 122 MHz was designed and fabricated with a pair of interdigital tr...

Full description

Saved in:
Bibliographic Details
Published in:Materials 2023-06, Vol.16 (13), p.4703
Main Authors: Chung, Chan-Yu, Chen, Ying-Chung, Juang, Feng-Renn, Kao, Kuo-Sheng, Lee, En-I
Format: Article
Language:English
Subjects:
Aluminum
Ammonia
Delay lines
Design
Electrodes
Gas sensors
Interdigital transducers
Lithium niobates
Magnetron sputtering
Molybdenum
Molybdenum disulfide
Nanospheres
Outdoor air quality
Photolithography
Resonant frequencies
Room temperature
Sensitivity
Sensors
Substrates
Surface acoustic wave devices
Surface acoustic waves
Temperature
Thin films
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:An ammonia sensor based on a delay-line surface acoustic wave (SAW) device is developed in this study by coating the delay line area of the device with a nano-structured molybdenum disulfide (MoS2) sensitive material. A SAW device of 122 MHz was designed and fabricated with a pair of interdigital transducers (IDTs) defined on a 128° y-cut LiNbO3 substrate using photolithography technologies, and the aluminum IDT electrodes were deposited by a DC magnetron sputtering system. By adjusting the pH values of precursor solutions, molybdenum disulfide (MoS2) nanospheres were prepared with various structures using a hydrothermal method. Finally, an NH3 gas sensor with high sensitivity of 4878 Hz/ppm, operating at room temperature, was successfully obtained. The excellent sensitivity performance may be due to the efficient adsorption of NH3 gas molecules on the surfaces of the nanoflower-like MoS2, which has a larger specific surface area and provides more active sites, and results in a larger change in the resonant frequency of the device due to the mass loading effect.
ISSN:1996-1944
1996-1944
DOI:10.3390/ma16134703