Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer

The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components....

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Published in:Scientific reports 2015-03, Vol.5 (1), p.9510-9510, Article 9510
Main Authors: Chen, Guohao, Zhao, Xinru, Wang, Xiaozhi, Jin, Hao, Li, Shijian, Dong, Shurong, Flewitt, A. J., Milne, W. I., Luo, J. K.
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Language:English
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639/166/987
639/301/1005
639/925/927
Acoustics
Fabrication
Humanities and Social Sciences
Integration
Microelectromechanical systems
multidisciplinary
Polymers
Science
Silicon
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cited_by cdi_FETCH-LOGICAL-c438t-f5d6dfad201050760960735ef27fc0c5072b326575d9ef6d37e95f46b86669093
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container_title Scientific reports
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creator Chen, Guohao
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Wang, Xiaozhi
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Milne, W. I.
Luo, J. K.
description The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components. A new architecture is demonstrated which permits fabrication and integration of FBARs on arbitrary substrates. Wave confinement is achieved by fabricating the resonator on a polyimide support layer. Results show when the polymer thickness is greater than a critical value, d, the FBARs have similar performance to devices using alternative architectures. For ZnO FBARs operating at 1.3–2.2 GHz, d is ~9 μm and the devices have a Q -factor of 470, comparable to 493 for the membrane architecture devices. The polymer support makes the resonators insensitive to the underlying substrate. Yields over 95% have been achieved on roughened silicon, copper and glass.
doi_str_mv 10.1038/srep09510
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subjects 639/166/987
639/301/1005
639/925/927
Acoustics
Fabrication
Humanities and Social Sciences
Integration
Microelectromechanical systems
multidisciplinary
Polymers
Science
Silicon
title Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer
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