Engineering interface-type resistive switching in BiFeO3 thin film switches by Ti implantation of bottom electrodes

BiFeO 3 based MIM structures with Ti-implanted Pt bottom electrodes and Au top electrodes have been fabricated on Sapphire substrates. The resulting metal-insulator-metal (MIM) structures show bipolar resistive switching without an electroforming process. It is evidenced that during the BiFeO 3 thin...

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Bibliographic Details
Published in:Scientific reports 2015-12, Vol.5 (1), p.18623-18623, Article 18623
Main Authors: You, Tiangui, Ou, Xin, Niu, Gang, Bärwolf, Florian, Li, Guodong, Du, Nan, Bürger, Danilo, Skorupa, Ilona, Jia, Qi, Yu, Wenjie, Wang, Xi, Schmidt, Oliver G., Schmidt, Heidemarie
Format: Article
Language:English
Subjects:
639/766/1130/2798
639/925/927/1007
Atomic force microscopy
Electrodes
Humanities and Social Sciences
multidisciplinary
Scaling
Science
Thin films
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Summary:BiFeO 3 based MIM structures with Ti-implanted Pt bottom electrodes and Au top electrodes have been fabricated on Sapphire substrates. The resulting metal-insulator-metal (MIM) structures show bipolar resistive switching without an electroforming process. It is evidenced that during the BiFeO 3 thin film growth Ti diffuses into the BiFeO 3 layer. The diffused Ti effectively traps and releases oxygen vacancies and consequently stabilizes the resistive switching in BiFeO 3 MIM structures. Therefore, using Ti implantation of the bottom electrode, the retention performance can be greatly improved with increasing Ti fluence. For the used raster-scanned Ti implantation the lateral Ti distribution is not homogeneous enough and endurance slightly degrades with Ti fluence. The local resistive switching investigated by current sensing atomic force microscopy suggests the capability of down-scaling the resistive switching cell to one BiFeO 3 grain size by local Ti implantation of the bottom electrode.
ISSN:2045-2322
2045-2322
DOI:10.1038/srep18623