Energy-Filtered High-Resolution Electron Microscopy for Quantitative Solid State Structure Determination

Energy-filtered (or selected) electron imaging is one of the future directions of high-resolution electron microscopy (HREM). In this paper, the characteristics and applications of energy-selected electron imaging at high-resolution for structure determinations are illustrated. It is shown that imag...

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Bibliographic Details
Published in:Journal of research of the National Institute of Standards and Technology 1997-01, Vol.102 (1), p.1-13
Main Authors: Wang, Z L, van Heerden, D, Josell, D, Shapiro, A J
Format: Article
Language:English
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Summary:Energy-filtered (or selected) electron imaging is one of the future directions of high-resolution electron microscopy (HREM). In this paper, the characteristics and applications of energy-selected electron imaging at high-resolution for structure determinations are illustrated. It is shown that image contrast can be dramatically improved with the use of an energy filter. High-resolution chemical-sensitive imaging using ionization-loss electrons is demonstrated in studies of Ni/Ti and Al/Ti multilayer thin films. It is also shown that the spatial resolution of energy-selected ionization edge electron images is dominated by the signal-to-noise ratio. Experimental parameters which may be selected to improve the signal-to-noise ratio are discussed.
ISSN:1044-677X
2165-7254
DOI:10.6028/jres.102.002