Stress Writing Textured Graphite Conducting Wires/Patterns in Insulating Amorphous Carbon Matrix as Interconnects

This study reports a mechanical stress-based technique that involves scratching or imprinting to write textured graphite conducting wires/patterns in an insulating amorphous carbon matrix for potential use as interconnects in future carbonaceous circuits. With low-energy post-annealing below the tem...

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Bibliographic Details
Published in:Scientific reports 2017-08, Vol.7 (1), p.9727-10, Article 9727
Main Authors: Wang, Ding-Shiang, Chang, Shou-Yi, Chen, Tai-Sheng, Chou, Tung-Huan, Huang, Yi-Ching, Wu, Jin-Bao, Leu, Ming-Sheng, Lai, Hong-Jen
Format: Article
Language:English
Subjects:
140/133
142/136
639/301/1005/1007
639/301/357/995
639/925/357/995
Carbon
Crystallization
Graphite
Humanities and Social Sciences
multidisciplinary
Nanotubes
Nuclei
Raman spectroscopy
Science
Science (multidisciplinary)
Temperature requirements
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Summary:This study reports a mechanical stress-based technique that involves scratching or imprinting to write textured graphite conducting wires/patterns in an insulating amorphous carbon matrix for potential use as interconnects in future carbonaceous circuits. With low-energy post-annealing below the temperature that is required for the thermal graphitization of amorphous carbon, the amorphous carbon phase only in the mechanically stressed regions transforms into a well aligned crystalline graphite structure with a low electrical resistivity of 420 μΩ-cm, while the surrounding amorphous carbon matrix remains insulating. Micro-Raman spectra with obvious graphitic peaks and high-resolution transmission electron microscopic observations of clear graphitic lattice verified the localized phase transformation of amorphous carbon into textured graphite exactly in the stressed regions. The stress-induced reconstruction of carbon bonds to generate oriented graphitic nuclei is believed to assist in the pseudo-self-formation of textured graphite during low-temperature post annealing.
ISSN:2045-2322
2045-2322
DOI:10.1038/s41598-017-10294-1