NO gas sensor based on ZnGa2O4 epilayer grown by metalorganic chemical vapor deposition

A gas sensor based on a ZnGa 2 O 4 (ZGO) thin film grown by metalorganic chemical vapor deposition operated under the different temperature from 25 °C to 300 °C is investigated in this study. This sensor shows great sensing properties at 300 °C. The sensitivity of this sensor is 22.21 as exposed to...

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Bibliographic Details
Published in:Scientific reports 2019-05, Vol.9 (1), p.7459-7459, Article 7459
Main Authors: Wu, Min-Ru, Li, Wei-Zhong, Tung, Chun-Yi, Huang, Chiung-Yi, Chiang, Yi-Hung, Liu, Po-Liang, Horng, Ray-Hua
Format: Article
Language:English
Subjects:
639/301/1005
704/172/4081
Carbon dioxide
Chemical vapor deposition
Humanities and Social Sciences
Internet of Things
multidisciplinary
Nitrogen dioxide
Science
Science (multidisciplinary)
Sensors
Vapors
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Summary:A gas sensor based on a ZnGa 2 O 4 (ZGO) thin film grown by metalorganic chemical vapor deposition operated under the different temperature from 25 °C to 300 °C is investigated in this study. This sensor shows great sensing properties at 300 °C. The sensitivity of this sensor is 22.21 as exposed to 6.25 ppm of NO and its response time is 57 s. Besides that, the sensitivities are 1.18, 1.27, 1.06, and 1.00 when exposed to NO 2 (500 ppb), SO 2 (125 ppm), CO (125 ppm), and CO 2 (1500 ppm), respectively. These results imply that the ZGO gas sensor not only has high sensitivity, but also has great selectivity for NO gas. Moreover, the obtained results suggest that ZGO sensors are suitable for the internet of things(IOT) applications.
ISSN:2045-2322
2045-2322
DOI:10.1038/s41598-019-43752-z