Surface Morphology and Microstructure Evolution of Single Crystal Diamond during Different Homoepitaxial Growth Stages

Homoepitaxial growth of step-flow single crystal diamond was performed by microwave plasma chemical vapor deposition system on high-pressure high-temperature diamond substrate. A coarse surface morphology with isolated particles was firstly deposited on diamond substrate as an interlayer under hillo...

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Bibliographic Details
Published in:Materials 2021-10, Vol.14 (20), p.5964
Main Authors: Shao, Guoqing, Wang, Juan, Zhang, Shumiao, Wang, Yanfeng, Wang, Wei, Wang, Hong-Xing
Format: Article
Language:English
Subjects:
Chemical vapor deposition
Cross-sections
Crystal growth
Crystal structure
Diamonds
Evolution
Growth models
High temperature
Hydrocarbons
Inhomogeneity
Interlayers
Microstructure
Microwave plasmas
Morphology
Photoluminescence
Plasma
Scanning electron microscopy
Single crystals
Spectrum analysis
Substrates
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Summary:Homoepitaxial growth of step-flow single crystal diamond was performed by microwave plasma chemical vapor deposition system on high-pressure high-temperature diamond substrate. A coarse surface morphology with isolated particles was firstly deposited on diamond substrate as an interlayer under hillock growth model. Then, the growth model was changed to step-flow growth model for growing step-flow single crystal diamond layer on this hillock interlayer. Furthermore, the surface morphology evolution, cross-section and surface microstructure, and crystal quality of grown diamond were evaluated by scanning electron microscopy, high-resolution transmission electron microcopy, and Raman and photoluminescence spectroscopy. It was found that the surface morphology varied with deposition time under step-flow growth parameters. The cross-section topography exhibited obvious inhomogeneity in crystal structure. Additionally, the diamond growth mechanism from the microscopic point of view was revealed to illustrate the morphological and structural evolution.
ISSN:1996-1944
1996-1944
DOI:10.3390/ma14205964