Burger Model as the Best Option for Modeling of Viscoelastic Behavior of Resists for Nanoimprint Lithography

In this study, Atomic Force Microscopy-based nanoindentation (AFM-NI) with diamond-like carbon (DLC) coated tip was used to analyze the mechanical response of poly(methyl methacrylate) (PMMA) thin films (thicknesses: 235 and 513 nm) on a silicon substrate. Then, Oliver and Pharr (OP) model was used...

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Bibliographic Details
Published in:Materials 2021-11, Vol.14 (21), p.6639
Main Authors: Grzywacz, Hubert, Jenczyk, Piotr, Milczarek, Michał, Michałowski, Marcin, Jarząbek, Dariusz M.
Format: Article
Language:English
Subjects:
Atomic force microscopy
Compliance
Diamond-like carbon films
Experiments
Glass transition temperature
Hardness
Load
Mathematical models
Mechanical analysis
Mechanical properties
Methods
Modulus of elasticity
Nanoindentation
Nanolithography
Parameter sensitivity
Polymethyl methacrylate
Silicon substrates
Thickness
Thin films
Viscoelasticity
Viscosity
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Summary:In this study, Atomic Force Microscopy-based nanoindentation (AFM-NI) with diamond-like carbon (DLC) coated tip was used to analyze the mechanical response of poly(methyl methacrylate) (PMMA) thin films (thicknesses: 235 and 513 nm) on a silicon substrate. Then, Oliver and Pharr (OP) model was used to calculate hardness and Young’s modulus, while three different Static Linear Solid models were used to fit the creep curve and measure creep compliance, Young’s modulus, and viscosity. Values were compared with each other, and the best-suited method was suggested. The impact of four temperatures below the glass transition temperature and varied indentation depth on the mechanical properties has been analyzed. The results show high sensitivity on experiment parameters and there is a clear difference between thin and thick film. According to the requirements in the nanoimprint lithography (NIL), the ratio of hardness at demolding temperature to viscosity at molding temperature was introduced as a simple parameter for prediction of resist suitability for NIL. Finally, thinner PMMA film was tentatively attributed as more suitable for NIL.
ISSN:1996-1944
1996-1944
DOI:10.3390/ma14216639