hBN Flake Embedded Al2O3 Thin Film for Flexible Moisture Barrier

Due to the vulnerability of organic optoelectronic devices to moisture and oxygen, thin-film moisture barriers have played a critical role in improving the lifetime of the devices. Here, we propose a hexagonal boron nitride (hBN) embedded Al2O3 thin film as a flexible moisture barrier. After layer-b...

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Bibliographic Details
Published in:Materials 2021-12, Vol.14 (23), p.7373
Main Authors: Jang, Wonseok, Han, Seunghun, Gu, Taejun, Chae, Heeyeop, Whang, Dongmok
Format: Article
Language:English
Subjects:
Aluminum oxide
Atomic layer epitaxy
Bend radius
Bending fatigue
Boron nitride
Chemical vapor deposition
Communication
Crack propagation
Defects
Diffusion layers
Fatigue tests
Flake composites
Flakes
Gases
Glass
Graphene
Humidity
Microscopy
Moisture
Optoelectronic devices
Polymers
Semiconductors
Service life assessment
Spectrum analysis
Staking
Thin films
Water vapor
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Summary:Due to the vulnerability of organic optoelectronic devices to moisture and oxygen, thin-film moisture barriers have played a critical role in improving the lifetime of the devices. Here, we propose a hexagonal boron nitride (hBN) embedded Al2O3 thin film as a flexible moisture barrier. After layer-by-layer (LBL) staking of polymer and hBN flake composite layer, Al2O3 was deposited on the nano-laminate template by spatial plasma atomic layer deposition (PEALD). Because the hBN flakes in Al2O3 thin film increase the diffusion path of moisture, the composite layer has a low water vapor transmission ratio (WVTR) value of 1.8 × 10−4 g/m2 day. Furthermore, as embedded hBN flakes restrict crack propagation, the composite film exhibits high mechanical stability in repeated 3 mm bending radius fatigue tests.
ISSN:1996-1944
1996-1944
DOI:10.3390/ma14237373