Niobium-tantalum oxide as a material platform for linear and nonlinear integrated photonics

Here we realize the first reported integrated photonic devices fabricated using sputtered niobium-tantalum oxide films. Sputtered niobium-tantalum oxide films are highly promising for integrated photonics as they are scalable to high volume manufacturing, possess high refractive index, and are trans...

Full description

Saved in:
Bibliographic Details
Published in:Optics express 2022-11, Vol.30 (23), p.42155-42167
Main Authors: MacFarlane, Neil, Schreyer-Miller, Aaron, Foster, Mark A., Houck, William D., Foster, Amy C.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Here we realize the first reported integrated photonic devices fabricated using sputtered niobium-tantalum oxide films. Sputtered niobium-tantalum oxide films are highly promising for integrated photonics as they are scalable to high volume manufacturing, possess high refractive index, and are transparent in the ultraviolet through near infrared wavelength range. At a wavelength near 1550 nm, we observe propagation losses as low as 0.47 dB/cm in waveguides and ring resonators with resonator quality factors as high as 860,000. We also characterize the nonlinear performance of these films and find a Kerr coefficient (n 2 ) of 1.2 ( ± 0.2) × 10 −18 m 2 /W. With this high Kerr coefficient we demonstrate optical parametric oscillation in a ring resonator and supercontinuum generation in a waveguide.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.473756