Optimization of Sputtering Process for Medium Entropy Alloy Nanotwinned CoCrFeNi Thin Films by Taguchi Method

We demonstrate a systematic study optimizing the properties of CoCrFeNi medium entropy alloy (MEA) thin films by tuning the deposition parameters of the pulsed direct current (DC) magnetron sputtering process. The chemical composition and microstructure of thin films were studied with energy dispers...

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Bibliographic Details
Published in:Materials 2022-11, Vol.15 (22), p.8238
Main Authors: Zhong, Jing-Yi, Wang, Jian-Jie, Ouyang, Fan-Yi
Format: Article
Language:English
Subjects:
Alloys
Analysis
Chemical composition
Confidence intervals
Corrosion resistance
Deposition
Dielectric films
Direct current
Entropy
Experiments
Face centered cubic lattice
Grain size
Magnetron sputtering
Medium entropy alloys
Methods
Optimization
Parameters
Research methodology
Residual stress
Signal to noise ratio
Specialty metals industry
Substrates
Surface roughness
Taguchi methods
Temperature
Thin films
Transmission electron microscopes
Variance analysis
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Summary:We demonstrate a systematic study optimizing the properties of CoCrFeNi medium entropy alloy (MEA) thin films by tuning the deposition parameters of the pulsed direct current (DC) magnetron sputtering process. The chemical composition and microstructure of thin films were studied with energy dispersive X-ray spectroscopy (EDS), an X-ray diffractometer (XRD) and a transmission electron microscope (TEM). Abundant nanotwins and the dual face-centered cubic-hexagonal close-packed (FCC-HCP) phases were formed in some specimens. The Taguchi experimental method and analysis of variance (ANOVA) were applied to find the optimized parameters. The control factors are five deposition parameters: substrate bias, substrate temperature, working pressure, rotation speed and pulsed frequency. According to the signal-to-noise ratio results, the optimized parameters for low electrical resistivity (98.2 ± 0.8 μΩ·cm), low surface roughness (0.5 ± 0.1 nm) and high hardness (9.3 ± 0.2 GPa) were achieved and verified with confirmed experiments.
ISSN:1996-1944
1996-1944
DOI:10.3390/ma15228238