Low-Temperature Direct Growth of Amorphous Boron Nitride Films for High-Performance Nanoelectronic Device Applications

• Published in: ACS applied materials & interfaces 2023-02, Vol.15 (5), p.7274-7281
• Main Authors: Sattari-Esfahlan, Seyed Mehdi, Kim, Hyoung Gyun, Hyun, Sang Hwa, Choi, Jun-Hui, Hwang, Hyun Sik, Kim, Eui-Tae, Park, Hyeong Gi, Lee, Jae-Hyun
• Format: Article
• Language: English
• Subjects: Functional Nanostructured Materials (including low-D carbon)
• ISSN: 1944-8244; 1944-8252
• DOI: 10.1021/acsami.2c18706

We successfully demonstrated the improvement and stabilization of the electrical properties of a graphene field effect transistor by fabricating a sandwiched amorphous boron nitride (a-BN)/graphene (Gr)/a-BN using a directly grown a-BN film. The a-BN film was grown via low-pressure chemical vapor deposition (LPCVD) at a low growth temperature of 250 °C and applied as a protection layer in the sandwiched structure. Both structural and chemical states of the as-grown a-BN were verified by various spectroscopic and microscopic analyses. We analyzed the Raman spectra of Gr/SiO2 and a-BN/Gr/a-BN structures to determine the stability of the device under exposure to ambient air. Following exposure, the intensity of the 2D/G-peak ratio of Gr/SiO2 decreased and the position of the G and 2D peaks red-shifted due to the degradation of graphene. In contrast, the peak position of encapsulated graphene is almost unchanged. We also confirmed that the mobility of a-BN/Gr/a-BN structure is 17,941 cm2/Vs. This synthetic strategy could provide a facile way to synthesize uniform a-BN film for encapsulating various van der Waals materials, which is beneficial for future applications in nanoelectronics.