Correction: Composition control of conformal crystalline GeSbTe films by atomic layer deposition supercycles and tellurization annealing

Correction for Composition control of conformal crystalline GeSbTe films by atomic layer deposition supercycles and tellurization annealing by Yewon Kim et al. , J. Mater. Chem. C , 2022, 10 , 96919698, DOI: https://doi.org/10.1039/D2TC00784C .

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Bibliographic Details
Published in:Journal of materials chemistry. C, Materials for optical and electronic devices Materials for optical and electronic devices, 2022-08, Vol.1 (32), p.11811-11811
Main Authors: Kim, Yewon, Kim, Kwonyoung, Kim, Okhyeon, Park, Chang Yup, Koo, Dong Geon, Ahn, Dong-Ho, Kuh, Bong Jin, Lee, Won-Jun
Format: Article
Language:English
Online Access:Get full text
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Summary:Correction for Composition control of conformal crystalline GeSbTe films by atomic layer deposition supercycles and tellurization annealing by Yewon Kim et al. , J. Mater. Chem. C , 2022, 10 , 96919698, DOI: https://doi.org/10.1039/D2TC00784C .
ISSN:2050-7526
2050-7534
DOI:10.1039/d2tc90156k