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Correction: Interfacial engineering of a Mo/HfZrO/Si capacitor using the direct scavenging effect of a thin Ti layer
Correction for 'Interfacial engineering of a Mo/Hf 0.3 Zr 0.7 O 2 /Si capacitor using the direct scavenging effect of a thin Ti layer' by Se Hyun Kim et al. , Chem. Commun. , 2021, 57 , 12452-12455, https://doi.org/10.1039/D1CC04966F .
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Published in: | Chemical communications (Cambridge, England) England), 2023-02, Vol.59 (18), p.2668-2668 |
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Main Authors: | , , , , , , , , |
Format: | Article |
Language: | |
Online Access: | Get full text |
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Summary: | Correction for 'Interfacial engineering of a Mo/Hf
0.3
Zr
0.7
O
2
/Si capacitor using the direct scavenging effect of a thin Ti layer' by Se Hyun Kim
et al.
,
Chem. Commun.
, 2021,
57
, 12452-12455,
https://doi.org/10.1039/D1CC04966F
. |
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ISSN: | 1359-7345 1364-548X |
DOI: | 10.1039/d3cc90042h |