Production of H‐atom and O‐atom beams by a cooled microwave discharge source

A beam of hydrogen and oxygen atoms in the thermal energy range was produced by microwave discharge. The microwave apparatus was used inside a vacuum chamber and therefore required a cooling system. We observed a typical dissociation efficiency of 0.63 from the hydrogen discharge and of 0.73 from a...

Full description

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 1977-08, Vol.48 (8), p.1002-1004
Main Authors: Ding, A., Karlau, J., Weise, J.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A beam of hydrogen and oxygen atoms in the thermal energy range was produced by microwave discharge. The microwave apparatus was used inside a vacuum chamber and therefore required a cooling system. We observed a typical dissociation efficiency of 0.63 from the hydrogen discharge and of 0.73 from a mixture of hydrogen and argon. After coating with concentrated ortho‐phosphoric acid, a hydrogen dissociation efficiency as high as 0.82 could be observed. The fraction of dissociated oxygen molecules was measured to be 0.33.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1135198