Fast valve for gas injection into vacuum

A simple, fast, reliable magnetically driven gas valve for use in plasma experiments is described. The pressure rise time has been measured to be ∼1 Torr/μs at the valve opening.

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Bibliographic Details
Published in:Review of scientific instruments 1978-06, Vol.49 (6), p.872-873
Main Authors: Fisher, A., Mako, F., Shiloh, J.
Format: Article
Language:English
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Description
Summary:A simple, fast, reliable magnetically driven gas valve for use in plasma experiments is described. The pressure rise time has been measured to be ∼1 Torr/μs at the valve opening.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1135637