Use of electron gun to regulate the radio‐frequency plasma performance and beam optics

The addition of electrons in both rf plasma and ion beam extracted from a rf ion source enhanced the source’s performance and beam optics. The increase of plasma intensity increases the charge state of the extracted ions. The mixing of electrons with the ions within the ion beam decreases the space...

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Bibliographic Details
Published in:Review of Scientific Instruments 1994-04, Vol.65 (4), p.1454-1456
Main Authors: Abdelaziz, M. E., Awaad, Z., Zakhary, S. G., Abdel‐Ghaffar, A. M.
Format: Article
Language:English
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Summary:The addition of electrons in both rf plasma and ion beam extracted from a rf ion source enhanced the source’s performance and beam optics. The increase of plasma intensity increases the charge state of the extracted ions. The mixing of electrons with the ions within the ion beam decreases the space charge effect on beam expansion.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1144942